52B datasheet(4/4 Pages) MKS

4 / 4 page

Ordering Information

Dimensional Drawing: Flow Through-

Note: Unless otherwise specified,

dimensions are nominal values in inches

(mm referenced).

11T

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel: 978.645.5500

Tel: 800.227.8766 (in U.S.A.)

Web: www.mksinst.com

41B_52B - 1/18

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.

Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of MKS

Instruments, Inc., Andover, MA. Inconel® is a registered trademark of Inco Alloys International, Huntington, WV.

Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH.

41B only

41B/42B only

41B/51B only

005

41B

Ordering Code Example: 41B11TCA1AA005

41B, 42B, 51B, 52B

Code

Configuration

Unheated Vacuum/Pressure Switch

Single-ended gauge

41B

Flow-through gauge

42B

Single-ended absolute

51B

Flow-through absolute

52B

Full Scale Ranges Available (Contact Applications Engineering for other engineering units)

10 Torr

11T

30 Torr

31T

100 Torr

12T

500 Torr

52T

1000 Torr

13T

20 psi

21P

50 psi

51P

100 psi

12P

250 psi

RDP

500 psi

52P

For Reverse Calibration only1 (trip point below atmospheric pressure):

10 Torr

11D

30 Torr

31D

100 Torr

12D

500 Torr

52D

1000 Torr

13D

20 psi

21C

50 psi

51C

100 psi

12C

250 psi

RDC

500 psi

52C

Fittings

NW 16 KF

1/8 NPT male

1/4 NPT male

4 VCR fixed male

4 VCR female

4 VCR fixed male

42B/52B only

Input Voltage

10-20 VDC

20-30 VDC

Relay Mode

Energizes with pressure above the set point

Energizes with pressure below the set point

Connector

9-pin Type “D” male

Flying leads - 2 ft. shielded cable

Trip Point2

Three digit value (in same units as F.S. ranges)

XXX

(For reverse calibration, the trip point is given as value below atmosphere.)

1 For a trip point of 000 (atmospheric pressure), use a reverse calibration Full Scale range code.

2 For the absolute model, the trip point is the actual pressure at which the relay should trip. For the

atmosphere model, the trip point is the pressure above or below atmospheric pressure at which the

relay should trip.

MKS Instruments, Inc.

Pressure & Vacuum Measurement Solutions

Six Shattuck Road

Andover, MA 01810

Tel: 978.975.2350

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