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52B Folha de dados(PDF) 2 Page - MKS Instruments. |
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52B Folha de dados(HTML) 2 Page - MKS Instruments. |
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2 / 4 page ![]() The design of these switches is based on the well-known MKS Baratron® capacitance manometer principle of operation. MKS has utilized this capacitance technology for more than three decades and it remains the most stable, accurate, and reliable sensor available today. The pressure switches sense the deflection of a diaphragm due to applied pressure, providing a switched output when pressure exceeds or drops below the chosen set point. The dual electrode sensor is an all-metal, all-welded design, thus exposing only corrosion-resistant 316L S.S. and Inconel® to process gases. The sensor is then mated to sophisticated electronics to further optimize performance. The resulting enhanced accuracy and long- term stability yield a switch with unparalleled repeatability. The relay mode on 41B, 42B, 51B, and 52B switches can be set to either energize above or below the set point. If the unit loses power, the relay switches to the Normally Closed position. The user can indicate whether the Normally Closed position is above or below the set point. Using Energize Above the set point as an example, the relay is in the Normally Open position when the pressure is higher than the trip point and Normally Closed when the pressure is below the trip point. The scenario is reversed for Energize Below the set point option. In vacuum systems, the fail-safe operation is if the system loses power causing the relay to de-energize, the relay is in the same state as the high pressure condition. Therefore, most vacuum systems require the relay energize with pressure decreasing or below the set point. The 41B, 42B, 51B and 52B Vacuum, Atmospheric and Pressure Switches provide increased accuracy over mechanical type switches, thereby providing tighter control and repeatability of process, improving throughput and yield. Dimensional Drawing: Single Ended— Note: Unless otherwise specified, dimensions are nomi- nal values in inches (mm referenced). Output Connections 9-pin Type “D” Flying Leads 1. Power Return (-) Red - Power Input (+) 2. Power Input (+) Black - Power Return (-) 3. Relay NO Contact Green - Relay NO Contact 4. Relay Common White - Relay Common 5. Relay NC Contact Orange - Relay NC Contact 6. Unused Bare Wire - Chassis Ground 7. Unused 8. Unused 9. Chassis Ground Low Pressure (1000 Torr and lower) |
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