PE3 datasheet(2/2 Pages) MACOM

2 / 2 page

GaAs Foundry Services

Process PE3

V2.00

Specifications Subject to Change Without Notice.

M/A-COM Inc.

North America: Tel. (800) 366-2266

♦ Asia/Pacific: Tel. +81 3 3263-8761

♦

Europe:

Tel. +44 (1344) 869-595

Fax (800) 618-8883

Fax +81 3 3263-8769

Fax +44 (1344) 300-020

Normalized Nominal Models

Parameter

25% IDSS 8 VDS

50% IDSS 8 VDS

IDS mA/mm

62.62

127.96

gm mS/mm

140.37

155.44

Cgs pF/mm

1.178

1.303

Cgd pF/mm

0.072

0.059

Cds pF/mm

0.172

0.185

Td pS

5.574

5.502

Ri Ohms-mm

2.093

1.729

Gds mS/mm

9.214

7.929

Ggs mS/mm

0.168

0.093

Rg Ohms/mm

47.996

Rs Ohms-mm

0.827

Rd Ohms-mm

0.865

Lg nH/Finger

0.108

Ld nH/Finger

0.108

Cgp pF/mm

0.148

Cdp pF/mm

0.148

Mask Layer Assignments

LAYER

PROCESS

CODE

PROCESS

DESCRIPTION

Ohmic

Boron Isolation

Resistor Deposition

Gate Finger

Gate Interconnect

Top via

Overlay

Air-post

Air-Span

Back-via

Final Passivation

Saw Street

NOTE: Unused layer numbers are reserved for future use.

GMAX - 900um FET

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