COMPex

COMPex Excimer lasers are highly effective light sources,

featuring a compact design and easy installation and opera-

tion. They deliver superior results in demanding applications,

such as solid sampling systems (LA-ICPMS), material research

(PLD) and precise material processing.

Featuring ceramic preionization, the COMPex provides

multi-hundred millijoules output, plus unmatched pulse-to-

pulse stability. The COMPex also comes with an improved

gas processor that extends both gas and optics lifetimes.

Features and Benefits

• Selection of 157 nm, 193 nm,

248 nm, 308 nm, and 351 nm

wavelengths for full material

flexibility

• Superior pulse energy of up

to 750 mJ to enable effective

ablation at large field size

• Unrivalled pulse stability of

0.75%, rms to ensure high

fluence control

• Ultimate pulse control and

system parameter logging to

deliver smart and reproducible

thin films

Applications

• PLD – Pulsed Laser Deposition

• Thin Wafer Processing

• Laser Lift-Off/Debonding

• LA-ICP-MS

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