Features
 Digital measuring principle in CMOS technology
 Up to 8 capacitances in grounded mode
 Up to 4 capacitances in floating mode (potential- free and with zero bias voltage)
 Compensation of internal (grounded) and external parasitic capacities (floating)
 High resolution: up to 6 aF at 5 Hz and 10 pF base capacitance, or 17 bit resolution at 5 Hz with 100 pF base capacitance and 10 pF excitation
 High measurement rate: up to 500 kHz
 Extremely low current consumption possible: Down to 4 μA at 3 Hz with 13.4 bit resolution

Applications
 Humidity sensors
 Position sensors
 Pressure sensors
 Force sensors
 Acceleration sensors
 Inclination sensors
 Tilt sensors
 Angle sensors
 Wireless applications
 Level sensors
 Microphones
 MEMS sensors